Thinning of Lithium Niobate Wafers with a Novel Designed Lapping Tool and Measurements: Fid-Bau Portal

Thinning of Lithium Niobate Wafers with a Novel Designed Lapping Tool and Measurements

Du, W.-l. / Liang, T. / Xue, C.-y. / Tang, J.-j. / Ye, T.

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Thinning of Lithium Niobate Wafers with a Novel Designed Lapping Tool and Measurements

Du, W.-l. / Liang, T. / Xue, C.-y. / Tang, J.-j. / Ye, T.

Thinning of Lithium Niobate Wafers with a Novel Designed Lapping Tool and Measurements

Du, W.-l. / Liang, T. / Xue, C.-y. / Tang, J.-j. / Ye, T.

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Document information

Title:

Thinning of Lithium Niobate Wafers with a Novel Designed Lapping Tool and Measurements

Contributors:

Du, W.-l. (author) / Liang, T. (author) / Xue, C.-y. (author) / Tang, J.-j. (author) / Ye, T. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -HANGZHOU- ; 28 ; 934-937

Publication date:

2010-01-01

Size:

4 pages

ISSN:

1673-2812

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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