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Microtool coatings using magnetron sputtering

Yang, S.C. / Cooke, K. / Aramcharoen, A. / Mativenga, P. / Teer, D.

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Microtool coatings using magnetron sputtering

Yang, S.C. / Cooke, K. / Aramcharoen, A. / Mativenga, P. / Teer, D.

Microtool coatings using magnetron sputtering

Yang, S.C. / Cooke, K. / Aramcharoen, A. / Mativenga, P. / Teer, D.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

Title:

Microtool coatings using magnetron sputtering

Contributors:

Yang, S.C. (author) / Cooke, K. (author) / Aramcharoen, A. (author) / Mativenga, P. (author) / Teer, D. (author)

Published in:

Reactive Sputter Deposition ; 20-24

MATERIALS TECHNOLOGY ; 26

Publication date:

2011-01-01

Size:

5 pages

ISSN:

1066-7857

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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