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Cost-effective SU-8 micro-structures by DUV excimer laser lithography for label-free biosensing

Sanza, F. J. / Laguna, M. F. / Casquel, R. / Holgado, M. / Barrios, C. A. / Ortega, F. J. / Lopez-Romero, D. / Garcia-Ballesteros, J. J. / Banuls, M. J. / Maquieira, A.

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Cost-effective SU-8 micro-structures by DUV excimer laser lithography for label-free biosensing

Sanza, F. J. / Laguna, M. F. / Casquel, R. / Holgado, M. / Barrios, C. A. / Ortega, F. J. / Lopez-Romero, D. / Garcia-Ballesteros, J. J. / Banuls, M. J. / Maquieira, A.

Cost-effective SU-8 micro-structures by DUV excimer laser lithography for label-free biosensing

Sanza, F. J. / Laguna, M. F. / Casquel, R. / Holgado, M. / Barrios, C. A. / Ortega, F. J. / Lopez-Romero, D. / Garcia-Ballesteros, J. J. / Banuls, M. J. / Maquieira, A.

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Title:

Cost-effective SU-8 micro-structures by DUV excimer laser lithography for label-free biosensing

Contributors:

Sanza, F. J. (author) / Laguna, M. F. (author) / Casquel, R. (author) / Holgado, M. (author) / Barrios, C. A. (author) / Ortega, F. J. (author) / Lopez-Romero, D. (author) / Garcia-Ballesteros, J. J. (author) / Banuls, M. J. (author) / Maquieira, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 5403-5407

Publication date:

2011-01-01

Size:

5 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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