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Direct creation of black silicon using femtosecond laser pulses

Vorobyev, A. Y. / Guo, C.

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Direct creation of black silicon using femtosecond laser pulses

Vorobyev, A. Y. / Guo, C.

Direct creation of black silicon using femtosecond laser pulses

Vorobyev, A. Y. / Guo, C.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Direct creation of black silicon using femtosecond laser pulses

Contributors:

Vorobyev, A. Y. (author) / Guo, C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 7291-7294

Publication date:

2011-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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