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Highly Textured (111) Pt Substrates for Preferred Orientation Controlled AlN Films
Highly Textured (111) Pt Substrates for Preferred Orientation Controlled AlN Films
Highly Textured (111) Pt Substrates for Preferred Orientation Controlled AlN Films
Harumoto, T. (author) / Muraishi, S. (author) / Shi, J. (author) / Nakamura, Y. (author) / Tan, Y. / Ju, D.
2011-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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