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Highly preferred orientation of Ga2O3 films sputtered on SiC substrates for deep UV photodetector application
Highly preferred orientation of Ga2O3 films sputtered on SiC substrates for deep UV photodetector application
Highly preferred orientation of Ga2O3 films sputtered on SiC substrates for deep UV photodetector application
Li, Meng-Qiu (author) / Yang, Ni (author) / Wang, Gui-Gen (author) / Zhang, Hua-Yu (author) / Han, Jie-Cai (author)
Applied surface science ; 471 ; 694-702
2019-01-01
9 pages
Article (Journal)
English
DDC:
620.44
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