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Influence of annealing temperature on the structural, optical and mechanical properties of ALD-derived ZnO thin films
Influence of annealing temperature on the structural, optical and mechanical properties of ALD-derived ZnO thin films
Influence of annealing temperature on the structural, optical and mechanical properties of ALD-derived ZnO thin films
Yen, C. Y. (author) / Jian, S. R. (author) / Chen, G. J. (author) / Lin, C. M. (author) / Lee, H. Y. (author) / Ke, W. C. (author) / Liao, Y. Y. (author) / Yang, P. F. (author) / Wang, C. T. (author) / Lai, Y. S. (author)
APPLIED SURFACE SCIENCE ; 257 ; 7900-7905
2011-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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