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A digital output accelerometer using MEMS-based piezoelectric accelerometers and arrayed CMOS inverters with satellite capacitors
A digital output accelerometer using MEMS-based piezoelectric accelerometers and arrayed CMOS inverters with satellite capacitors
A digital output accelerometer using MEMS-based piezoelectric accelerometers and arrayed CMOS inverters with satellite capacitors
Kobayashi, T. (author) / Okada, H. (author) / Masuda, T. (author) / Maeda, R. (author) / Itoh, T. (author)
SMART MATERIALS AND STRUCTURES ; 20 ; 065017
2011-01-01
65017 pages
Article (Journal)
English
DDC:
530
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