A Monolithic MEMS Accelerometer Process: Fid-Bau Portal

A Monolithic MEMS Accelerometer Process

Li, X.G. / Mei, Y. / Huang, W.G. / Zhang, Z.Y. / Li, J.G. / Feng, Z.C.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

A Monolithic MEMS Accelerometer Process

Li, X.G. / Mei, Y. / Huang, W.G. / Zhang, Z.Y. / Li, J.G. / Feng, Z.C.

A Monolithic MEMS Accelerometer Process

Li, X.G. / Mei, Y. / Huang, W.G. / Zhang, Z.Y. / Li, J.G. / Feng, Z.C.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

A Monolithic MEMS Accelerometer Process

Contributors:

Li, X.G. (author) / Mei, Y. (author) / Huang, W.G. (author) / Zhang, Z.Y. (author) / Li, J.G. (author) / Feng, Z.C. (author)

Published in:

KEY ENGINEERING MATERIALS ; 483 ; 70-74

Publication date:

2011-01-01

Size:

5 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Ma, S.M. / Chen, C. / Wang, T. et al. | British Library Online Contents | 2013

MEMS Monolithic Integration Technology

Zhang, Z.Y. / Shi, Z.G. / Yang, Z.C. et al. | British Library Online Contents | 2013

Vibration measurement of KIUT building by MEMS accelerometer

Minowa Chikahiro / Kaniev Djamshid / Rustamov Akmal | DOAJ | 2023

Free access

Integrated smart actuator containing a monolithic coformed accelerometer [3044-38]

Corsaro, R. D. / Houston, B. H. / Klunder, J. D. et al. | British Library Conference Proceedings | 1997

Design and Analysis of a Monolithic 3-Axis Micro-Accelerometer

Wang, X.H. / Chen, Z.H. / Xiao, D.B. et al. | British Library Online Contents | 2012