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    Measurements of residual stresses in Al film/silicon nitride substrate microcantilever beam systems

    New search for: Lin, C.-C.
    New search for: Fang, W.
    New search for: Lin, H.-Y.
    New search for: Hsueh, C.-H.
    New search for: Lee, S.

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    Measurements of residual stresses in Al film/silicon nitride substrate microcantilever beam systems

    New search for: Lin, C.-C.
    New search for: Fang, W.
    New search for: Lin, H.-Y.
    New search for: Hsueh, C.-H.
    New search for: Lee, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Measurements of residual stresses in Al film/silicon nitride substrate microcantilever beam systems

    New search for: Lin, C.-C.
    New search for: Fang, W.
    New search for: Lin, H.-Y.
    New search for: Hsueh, C.-H.
    New search for: Lee, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Measurements of residual stresses in Al film/silicon nitride substrate microcantilever beam systems

    Contributors:

    Lin, C.-C. (author) / Fang, W. (author) / Lin, H.-Y. (author) / Hsueh, C.-H. (author) / Lee, S. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 26 ; 1279-1284

    Publication date:

    2011-01-01

    Size:

    6 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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