Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Measurements of residual stresses in Al film/silicon nitride substrate microcantilever beam systems
Measurements of residual stresses in Al film/silicon nitride substrate microcantilever beam systems
Measurements of residual stresses in Al film/silicon nitride substrate microcantilever beam systems
Lin, C.-C. (Autor:in) / Fang, W. (Autor:in) / Lin, H.-Y. (Autor:in) / Hsueh, C.-H. (Autor:in) / Lee, S. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 26 ; 1279-1284
01.01.2011
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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