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Study of microstructure and nanomechanical properties of Zr films prepared by pulsed magnetron sputtering

Singh, A. / Kuppusami, P. / Thirumurugesan, R. / Ramaseshan, R. / Kamruddin, M. / Dash, S. / Ganesan, V. / Mohandas, E.

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Study of microstructure and nanomechanical properties of Zr films prepared by pulsed magnetron sputtering

Singh, A. / Kuppusami, P. / Thirumurugesan, R. / Ramaseshan, R. / Kamruddin, M. / Dash, S. / Ganesan, V. / Mohandas, E.

Study of microstructure and nanomechanical properties of Zr films prepared by pulsed magnetron sputtering

Singh, A. / Kuppusami, P. / Thirumurugesan, R. / Ramaseshan, R. / Kamruddin, M. / Dash, S. / Ganesan, V. / Mohandas, E.

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Document information

Title:

Study of microstructure and nanomechanical properties of Zr films prepared by pulsed magnetron sputtering

Contributors:

Singh, A. (author) / Kuppusami, P. (author) / Thirumurugesan, R. (author) / Ramaseshan, R. (author) / Kamruddin, M. (author) / Dash, S. (author) / Ganesan, V. (author) / Mohandas, E. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 9909-9914

Publication date:

2011-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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