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    Influence of nitrogen flow rate on microstructural and nanomechanical properties of Zr-N thin films prepared by pulsed DC magnetron sputtering

    New search for: Singh, A.
    New search for: Kuppusami, P.
    New search for: Khan, S.
    New search for: Sudha, C.
    New search for: Thirumurugesan, R.
    New search for: Ramaseshan, R.
    New search for: Divakar, R.
    New search for: Mohandas, E.
    New search for: Dash, S.

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    Influence of nitrogen flow rate on microstructural and nanomechanical properties of Zr-N thin films prepared by pulsed DC magnetron sputtering

    New search for: Singh, A.
    New search for: Kuppusami, P.
    New search for: Khan, S.
    New search for: Sudha, C.
    New search for: Thirumurugesan, R.
    New search for: Ramaseshan, R.
    New search for: Divakar, R.
    New search for: Mohandas, E.
    New search for: Dash, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Influence of nitrogen flow rate on microstructural and nanomechanical properties of Zr-N thin films prepared by pulsed DC magnetron sputtering

    New search for: Singh, A.
    New search for: Kuppusami, P.
    New search for: Khan, S.
    New search for: Sudha, C.
    New search for: Thirumurugesan, R.
    New search for: Ramaseshan, R.
    New search for: Divakar, R.
    New search for: Mohandas, E.
    New search for: Dash, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Influence of nitrogen flow rate on microstructural and nanomechanical properties of Zr-N thin films prepared by pulsed DC magnetron sputtering

    Contributors:

    Singh, A. (author) / Kuppusami, P. (author) / Khan, S. (author) / Sudha, C. (author) / Thirumurugesan, R. (author) / Ramaseshan, R. (author) / Divakar, R. (author) / Mohandas, E. (author) / Dash, S. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 280 ; 117-123

    Publication date:

    2013-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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