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Multiform structures with silicon nanopillars by cesium chloride self-assembly and dry etching

Liao, Y. x. / Liu, J. / Wang, B. / Yi, F. t.

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Multiform structures with silicon nanopillars by cesium chloride self-assembly and dry etching

Liao, Y. x. / Liu, J. / Wang, B. / Yi, F. t.

Multiform structures with silicon nanopillars by cesium chloride self-assembly and dry etching

Liao, Y. x. / Liu, J. / Wang, B. / Yi, F. t.

Access

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Order at Subito €

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Document information

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Document information

Title:

Multiform structures with silicon nanopillars by cesium chloride self-assembly and dry etching

Contributors:

Liao, Y. x. (author) / Liu, J. (author) / Wang, B. (author) / Yi, F. t. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 10489-10493

Publication date:

2011-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Liu, J. / Ashmkhan, M. / Wang, B. et al. | British Library Online Contents | 2012

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