STATISTICAL ANALYSIS OF FEMTOSECOND PULSES LASER ON HOLE DRILLING OF SILICON WAFER: Fid-Bau Portal

STATISTICAL ANALYSIS OF FEMTOSECOND PULSES LASER ON HOLE DRILLING OF SILICON WAFER

Jiao, L. / Ng, E.Y.K. / Zheng, H. / Wee, L.M.

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STATISTICAL ANALYSIS OF FEMTOSECOND PULSES LASER ON HOLE DRILLING OF SILICON WAFER

Jiao, L. / Ng, E.Y.K. / Zheng, H. / Wee, L.M.

STATISTICAL ANALYSIS OF FEMTOSECOND PULSES LASER ON HOLE DRILLING OF SILICON WAFER

Jiao, L. / Ng, E.Y.K. / Zheng, H. / Wee, L.M.

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Check availability in my library

Order at Subito €

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Document information

Title:

STATISTICAL ANALYSIS OF FEMTOSECOND PULSES LASER ON HOLE DRILLING OF SILICON WAFER

Contributors:

Jiao, L. (author) / Ng, E.Y.K. (author) / Zheng, H. (author) / Wee, L.M. (author)

Published in:

SURFACE REVIEW AND LETTERS ; 18 ; 39-45

Publication date:

2011-01-01

Size:

7 pages

ISSN:

0218-625X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 530.417

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