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A platform for research: civil engineering, architecture and urbanism
Design and Empirical Study for Coner Compensation in 25% Wt TMAH Etching on (100) Silicon Wafers
Design and Empirical Study for Coner Compensation in 25% Wt TMAH Etching on (100) Silicon Wafers
Design and Empirical Study for Coner Compensation in 25% Wt TMAH Etching on (100) Silicon Wafers
Niu, Z.Y. (author) / Wu, X.Z. (author) / Dong, P.T. (author) / Xiao, D.B. (author) / Hou, Z.Q. (author) / Chen, Z.H. (author) / Zhang, X. (author)
KEY ENGINEERING MATERIALS ; 483 ; 9-13
2011-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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CORNER FINISHING MEMBER OF CONER FOR BUILDING STRUCTURES
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