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An Electrostatic Force Feedback Approach for Extending the Bandwidth of MEMS Vibratory Gyroscope
An Electrostatic Force Feedback Approach for Extending the Bandwidth of MEMS Vibratory Gyroscope
An Electrostatic Force Feedback Approach for Extending the Bandwidth of MEMS Vibratory Gyroscope
Cui, J. (author) / Guo, Z.Y. (author) / Zhao, Q.C. (author) / Yang, Z.C. (author) / Hao, Y.L. (author) / Yan, G.Z. (author)
KEY ENGINEERING MATERIALS ; 483 ; 43-47
2011-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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