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    A MEMS Capacitive Gyroscope with Improved Reliability

    New search for: Liang, X.J.
    New search for: Gao, S.Q.
    New search for: Guo, D.
    New search for: Wang, J.
    New search for: Jia, Z.
    New search for: Kang, R.
    New search for: Gao, H.
    New search for: Wang, X.

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    A MEMS Capacitive Gyroscope with Improved Reliability

    New search for: Liang, X.J.
    New search for: Gao, S.Q.
    New search for: Guo, D.
    New search for: Wang, J.
    New search for: Jia, Z.
    New search for: Kang, R.
    New search for: Gao, H.
    New search for: Wang, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    A MEMS Capacitive Gyroscope with Improved Reliability

    New search for: Liang, X.J.
    New search for: Gao, S.Q.
    New search for: Guo, D.
    New search for: Wang, J.
    New search for: Jia, Z.
    New search for: Kang, R.
    New search for: Gao, H.
    New search for: Wang, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    A MEMS Capacitive Gyroscope with Improved Reliability

    Contributors:

    Liang, X.J. (author) / Gao, S.Q. (author) / Guo, D. / Wang, J. / Jia, Z. / Kang, R. / Gao, H. / Wang, X.

    Published in:

    Advances in Materials Manufacturing Science and Technology XIII ; 341-346

    MATERIALS SCIENCE FORUM ; 628/629

    Publication date:

    2009-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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