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Fabrication of Nano-Aperture Hollow Tip Array for Microplasma Etching

Xiang, W.W. / Wen, L. / Zhang, Q.P. / Chu, J.R.

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Fabrication of Nano-Aperture Hollow Tip Array for Microplasma Etching

Xiang, W.W. / Wen, L. / Zhang, Q.P. / Chu, J.R.

Fabrication of Nano-Aperture Hollow Tip Array for Microplasma Etching

Xiang, W.W. / Wen, L. / Zhang, Q.P. / Chu, J.R.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fabrication of Nano-Aperture Hollow Tip Array for Microplasma Etching

Contributors:

Xiang, W.W. (author) / Wen, L. (author) / Zhang, Q.P. (author) / Chu, J.R. (author)

Published in:

KEY ENGINEERING MATERIALS ; 483 ; 89-96

Publication date:

2011-01-01

Size:

8 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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