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Design and Implementation of SOI Based Capacitive Microaccelerometers Without Notching Effects

Liu, M. / Zhu, J.A. / Zhuo, M. / Wu, J. / Jia, S.X.

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Design and Implementation of SOI Based Capacitive Microaccelerometers Without Notching Effects

Liu, M. / Zhu, J.A. / Zhuo, M. / Wu, J. / Jia, S.X.

Design and Implementation of SOI Based Capacitive Microaccelerometers Without Notching Effects

Liu, M. / Zhu, J.A. / Zhuo, M. / Wu, J. / Jia, S.X.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Design and Implementation of SOI Based Capacitive Microaccelerometers Without Notching Effects

Contributors:

Liu, M. (author) / Zhu, J.A. (author) / Zhuo, M. (author) / Wu, J. (author) / Jia, S.X. (author)

Published in:

KEY ENGINEERING MATERIALS ; 483 ; 108-111

Publication date:

2011-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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