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Design and fabrication of wireless remotely readable MEMS based microaccelerometers
Design and fabrication of wireless remotely readable MEMS based microaccelerometers
Design and fabrication of wireless remotely readable MEMS based microaccelerometers
Subramanian, H. (author) / Varadan, V. K. (author) / Varadan, V. V. (author) / Vellekoop, M. J. (author) / Vellekoop, M. / Varadan, V.
1997-01-01
9 pages
Article (Journal)
English
DDC:
530
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