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Study on Resonant Characteristics of Closed-Loop Controlled Microcantilever

Guo, B. / Liu, S.B. / Liang, J.T. / Feng, W.G. / Liu, Y.X. / Li, J.P.

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Study on Resonant Characteristics of Closed-Loop Controlled Microcantilever

Guo, B. / Liu, S.B. / Liang, J.T. / Feng, W.G. / Liu, Y.X. / Li, J.P.

Study on Resonant Characteristics of Closed-Loop Controlled Microcantilever

Guo, B. / Liu, S.B. / Liang, J.T. / Feng, W.G. / Liu, Y.X. / Li, J.P.

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Check availability in my library

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Document information

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Document information

Title:

Study on Resonant Characteristics of Closed-Loop Controlled Microcantilever

Contributors:

Guo, B. (author) / Liu, S.B. (author) / Liang, J.T. (author) / Feng, W.G. (author) / Liu, Y.X. (author) / Li, J.P. (author)

Published in:

KEY ENGINEERING MATERIALS ; 483 ; 117-121

Publication date:

2011-01-01

Size:

5 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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