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Silicon made resonant microcantilever: Dependence of the chemical sensing performances on the sensitive coating thickness
Silicon made resonant microcantilever: Dependence of the chemical sensing performances on the sensitive coating thickness
Silicon made resonant microcantilever: Dependence of the chemical sensing performances on the sensitive coating thickness
Lochon, F. d. (author) / Fadel, L. (author) / Dufour, I. (author) / Rebière, D. (author) / Pistré, J. (author)
2006-01-01
6 pages
Article (Journal)
English
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