Structural and mechanical properties of multi-element (TiVCrZrHf)N coatings by reactive magnetron sputtering: Fid-Bau Portal

Structural and mechanical properties of multi-element (TiVCrZrHf)N coatings by reactive magnetron sputtering

Liang, S. C. / Tsai, D. C. / Chang, Z. C. / Sung, H. S. / Lin, Y. C. / Yeh, Y. J. / Deng, M. J. / Shieu, F. S.

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Structural and mechanical properties of multi-element (TiVCrZrHf)N coatings by reactive magnetron sputtering

Liang, S. C. / Tsai, D. C. / Chang, Z. C. / Sung, H. S. / Lin, Y. C. / Yeh, Y. J. / Deng, M. J. / Shieu, F. S.

Structural and mechanical properties of multi-element (TiVCrZrHf)N coatings by reactive magnetron sputtering

Liang, S. C. / Tsai, D. C. / Chang, Z. C. / Sung, H. S. / Lin, Y. C. / Yeh, Y. J. / Deng, M. J. / Shieu, F. S.

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Document information

Title:

Structural and mechanical properties of multi-element (TiVCrZrHf)N coatings by reactive magnetron sputtering

Contributors:

Liang, S. C. (author) / Tsai, D. C. (author) / Chang, Z. C. (author) / Sung, H. S. (author) / Lin, Y. C. (author) / Yeh, Y. J. (author) / Deng, M. J. (author) / Shieu, F. S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 258 ; 399-403

Publication date:

2011-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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Titanium Nitride - Silicon Nitride Composite Coatings Deposited by Reactive Magnetron Sputtering

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