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Titanium Nitride - Silicon Nitride Composite Coatings Deposited by Reactive Magnetron Sputtering
Titanium Nitride - Silicon Nitride Composite Coatings Deposited by Reactive Magnetron Sputtering
Titanium Nitride - Silicon Nitride Composite Coatings Deposited by Reactive Magnetron Sputtering
Patscheider, J. (author) / Diserens, M. (author) / Levy, F. (author)
MATERIALS SCIENCE FORUM ; 287/288 ; 267-268
1998-01-01
2 pages
Article (Journal)
English
DDC:
620.11
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