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The effects of low temperature and pressure on the fracture behaviors of organosilicate thin films
The effects of low temperature and pressure on the fracture behaviors of organosilicate thin films
The effects of low temperature and pressure on the fracture behaviors of organosilicate thin films
Barakat, S. (author) / Lee-Sullivan, P. (author) / Vitale, S.A. (author) / Tsui, T.Y. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 26 ; 2524-2532
2011-01-01
9 pages
Article (Journal)
English
DDC:
620.11
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