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Fracture of organosilicate glass thin films: environmental effects

Vlassak, J. J. / Lin, Y. / Tsui, T. Y.

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Fracture of organosilicate glass thin films: environmental effects

Vlassak, J. J. / Lin, Y. / Tsui, T. Y.

Fracture of organosilicate glass thin films: environmental effects

Vlassak, J. J. / Lin, Y. / Tsui, T. Y.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fracture of organosilicate glass thin films: environmental effects

Contributors:

Vlassak, J. J. (author) / Lin, Y. (author) / Tsui, T. Y. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING A ; 391 ; 159-174

Publication date:

2005-01-01

Size:

16 pages

ISSN:

0921-5093

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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