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Structural and electrical properties of AlN films deposited using reactive RF magnetron sputtering for solar concentrator application
Structural and electrical properties of AlN films deposited using reactive RF magnetron sputtering for solar concentrator application
Structural and electrical properties of AlN films deposited using reactive RF magnetron sputtering for solar concentrator application
Kale, A. (author) / Brusa, R. S. (author) / Miotello, A. (author)
APPLIED SURFACE SCIENCE ; 258 ; 3450-3454
2012-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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