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Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering

Broitman, E. / Hellgren, N. / Wanstrand, O. / Johansson, M. P. / Berlind, T. / Sjostrom, H. / Sundgren, J. E. / Larsson, M. / Hultman, L.

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Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering

Broitman, E. / Hellgren, N. / Wanstrand, O. / Johansson, M. P. / Berlind, T. / Sjostrom, H. / Sundgren, J. E. / Larsson, M. / Hultman, L.

Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering

Broitman, E. / Hellgren, N. / Wanstrand, O. / Johansson, M. P. / Berlind, T. / Sjostrom, H. / Sundgren, J. E. / Larsson, M. / Hultman, L.

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Document information

Title:

Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering

Contributors:

Broitman, E. (author) / Hellgren, N. (author) / Wanstrand, O. (author) / Johansson, M. P. (author) / Berlind, T. (author) / Sjostrom, H. (author) / Sundgren, J. E. (author) / Larsson, M. (author) / Hultman, L. (author)

Published in:

WEAR -LAUSANNE- ; 248 ; 55-64

Publication date:

2001-01-01

Size:

10 pages

ISSN:

0043-1648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11292

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