Status and Trends of Fixed Abrasive Polishing on Semiconductor: Fid-Bau Portal

Status and Trends of Fixed Abrasive Polishing on Semiconductor

Zhao, Y. / Zuo, D.W. / Sun, Y.L.

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Status and Trends of Fixed Abrasive Polishing on Semiconductor

Zhao, Y. / Zuo, D.W. / Sun, Y.L.

Status and Trends of Fixed Abrasive Polishing on Semiconductor

Zhao, Y. / Zuo, D.W. / Sun, Y.L.

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Check availability in my library

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Document information

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Document information

Title:

Status and Trends of Fixed Abrasive Polishing on Semiconductor

Contributors:

Zhao, Y. (author) / Zuo, D.W. (author) / Sun, Y.L. (author) / Zuo, D. / Huang, C. / Chen, M. / Li, J. / Hun, G.

Published in:

Anti-Fatigue Design and Manufacturing Technologies I ; 390-396

KEY ENGINEERING MATERIALS ; 499

Publication date:

2012-01-01

Size:

7 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Li, J. / Zhu, Y.W. / Zuo, D.W. et al. | British Library Online Contents | 2010

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