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The deposition of a thick tetrahedral amorphous carbon film by argon ion bombardment

Liang, H. / Delian, L. / Xian, C. / Li, Y. / Yuqing, Z.

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The deposition of a thick tetrahedral amorphous carbon film by argon ion bombardment

Liang, H. / Delian, L. / Xian, C. / Li, Y. / Yuqing, Z.

The deposition of a thick tetrahedral amorphous carbon film by argon ion bombardment

Liang, H. / Delian, L. / Xian, C. / Li, Y. / Yuqing, Z.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

The deposition of a thick tetrahedral amorphous carbon film by argon ion bombardment

Contributors:

Liang, H. (author) / Delian, L. (author) / Xian, C. (author) / Li, Y. (author) / Yuqing, Z. (author)

Published in:

APPLIED SURFACE SCIENCE ; 258 ; 4794-4800

Publication date:

2012-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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