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Tetrahedral Amorphous Carbon Films Prepared by Filtered Catholic Vacuum Arc Deposition

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Low Stress Tetrahedral Amorphous Carbon Films Prepared by Filtered Vacuum Arc Deposition

Zhang, X. / Zhang, H. / Wu, X. et al. | British Library Online Contents | 2005

Strongly adhering and thick highly tetrahedral amorphous carbon (ta-C) thin films via surface modification by implantation

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Particle Bombardment Effects in Thin Film Deposition

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