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Detailed Experimental Study of Mean and Gradient Stresses in Thin 3C-SiC Films Performed Using Micromachined Cantilevers
Detailed Experimental Study of Mean and Gradient Stresses in Thin 3C-SiC Films Performed Using Micromachined Cantilevers
Detailed Experimental Study of Mean and Gradient Stresses in Thin 3C-SiC Films Performed Using Micromachined Cantilevers
Jiao, S. (author) / Zielinski, M. (author) / Michaud, J.F. (author) / Chassagne, T. (author) / Portail, M. (author) / Alquier, D. (author) / Alquier, D.
2012-01-01
7 pages
Article (Journal)
English
DDC:
620.11
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