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Investigation of Al-Ti Ohmic Contact to N-Type 4H-SiC

Drevin-Bazin, A. / Barbot, J.F. / Cabioch, T. / Beaufort, M.F.

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Investigation of Al-Ti Ohmic Contact to N-Type 4H-SiC

Drevin-Bazin, A. / Barbot, J.F. / Cabioch, T. / Beaufort, M.F.

Investigation of Al-Ti Ohmic Contact to N-Type 4H-SiC

Drevin-Bazin, A. / Barbot, J.F. / Cabioch, T. / Beaufort, M.F.

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Title:

Investigation of Al-Ti Ohmic Contact to N-Type 4H-SiC

Contributors:

Drevin-Bazin, A. (author) / Barbot, J.F. (author) / Cabioch, T. (author) / Beaufort, M.F. (author) / Alquier, D.

Published in:

HeteroSiC & WASMPE 2011 ; 184-187

MATERIALS SCIENCE FORUM ; 711

Publication date:

2012-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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