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Phase and structural evolution of sol–gel synthesized ZrO2/Si thin films under heat treatment
Phase and structural evolution of sol–gel synthesized ZrO2/Si thin films under heat treatment
Phase and structural evolution of sol–gel synthesized ZrO2/Si thin films under heat treatment
Hwang, S. M. (author) / Park, G. C. (author) / Lim, J. H. (author) / Joo, J. (author)
JOURNAL OF MATERIALS SCIENCE ; 47 ; 5216-5221
2012-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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