Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si~3N~4 Multilayered Composite Membrane: Fid-Bau Portal

Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si~3N~4 Multilayered Composite Membrane

Xue, M.X. / Liu, M.W. / Li, X. / Li, J.H.

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Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si~3N~4 Multilayered Composite Membrane

Xue, M.X. / Liu, M.W. / Li, X. / Li, J.H.

Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si~3N~4 Multilayered Composite Membrane

Xue, M.X. / Liu, M.W. / Li, X. / Li, J.H.

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Title:

Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si~3N~4 Multilayered Composite Membrane

Contributors:

Xue, M.X. (author) / Liu, M.W. (author) / Li, X. (author) / Li, J.H. (author) / Wang, X.

Published in:

Micro-Nano Technology XIII Selected, peer reviewed papers from the 13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China ; 29-34

KEY ENGINEERING MATERIALS ; 503

Publication date:

2012-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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