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Simulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers
Simulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers
Simulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers
Liu, Y. (author) / Zhao, Y.L. (author) / Sun, L. (author) / Wang, X.
2012-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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