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    High Frequency 3C-SiC AFM Cantilever Using Thermal Actuation and Metallic Piezoresistive Detection

    New search for: Boubekri, R.
    New search for: Cambril, E.
    New search for: Couraud, L.
    New search for: Bernardi, L.
    New search for: Madouri, A.
    New search for: Martrou, D.
    New search for: Gauthier, S.
    New search for: Alquier, D.

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    High Frequency 3C-SiC AFM Cantilever Using Thermal Actuation and Metallic Piezoresistive Detection

    New search for: Boubekri, R.
    New search for: Cambril, E.
    New search for: Couraud, L.
    New search for: Bernardi, L.
    New search for: Madouri, A.
    New search for: Martrou, D.
    New search for: Gauthier, S.
    New search for: Alquier, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    High Frequency 3C-SiC AFM Cantilever Using Thermal Actuation and Metallic Piezoresistive Detection

    New search for: Boubekri, R.
    New search for: Cambril, E.
    New search for: Couraud, L.
    New search for: Bernardi, L.
    New search for: Madouri, A.
    New search for: Martrou, D.
    New search for: Gauthier, S.
    New search for: Alquier, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    High Frequency 3C-SiC AFM Cantilever Using Thermal Actuation and Metallic Piezoresistive Detection

    Contributors:

    Boubekri, R. (author) / Cambril, E. (author) / Couraud, L. (author) / Bernardi, L. (author) / Madouri, A. (author) / Martrou, D. (author) / Gauthier, S. (author) / Alquier, D.

    Published in:

    HeteroSiC & WASMPE 2011 ; 80-83

    MATERIALS SCIENCE FORUM ; 711

    Publication date:

    2012-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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