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Vibration Characteristic Analysis of V-Shaped Electrothermal Microactuator

Wang, Z.L. / Shen, X.J. / Zhou, L. / Chen, X.Y.

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Vibration Characteristic Analysis of V-Shaped Electrothermal Microactuator

Wang, Z.L. / Shen, X.J. / Zhou, L. / Chen, X.Y.

Vibration Characteristic Analysis of V-Shaped Electrothermal Microactuator

Wang, Z.L. / Shen, X.J. / Zhou, L. / Chen, X.Y.

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Order at Subito €

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Document information

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Document information

Title:

Vibration Characteristic Analysis of V-Shaped Electrothermal Microactuator

Contributors:

Wang, Z.L. (author) / Shen, X.J. (author) / Zhou, L. (author) / Chen, X.Y. (author) / Wang, X.

Published in:

Micro-Nano Technology XIII Selected, peer reviewed papers from the 13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China ; 118-121

KEY ENGINEERING MATERIALS ; 503

Publication date:

2012-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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