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An Interface for Low-Q Micromachined Gyroscope

Wang, G.S. / Tao, M. / Liu, X.W.

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An Interface for Low-Q Micromachined Gyroscope

Wang, G.S. / Tao, M. / Liu, X.W.

An Interface for Low-Q Micromachined Gyroscope

Wang, G.S. / Tao, M. / Liu, X.W.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

An Interface for Low-Q Micromachined Gyroscope

Contributors:

Wang, G.S. (author) / Tao, M. (author) / Liu, X.W. (author) / Wang, X.

Published in:

Micro-Nano Technology XIII Selected, peer reviewed papers from the 13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China ; 128-133

KEY ENGINEERING MATERIALS ; 503

Publication date:

2012-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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