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A Z-Axis Decoupled Micromachined Gyroscope with Dual Frames
A Z-Axis Decoupled Micromachined Gyroscope with Dual Frames
A Z-Axis Decoupled Micromachined Gyroscope with Dual Frames
Tang, H.L. (author) / Liu, X.X. (author) / Zhou, H. (author)
KEY ENGINEERING MATERIALS ; 483 ; 169-173
2011-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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