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Closed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined Gyroscope
Closed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined Gyroscope
Closed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined Gyroscope
Mo, B. (author) / Zheng, Q. (author) / Chen, S.H. (author) / Zhou, H. (author) / Ling, C.D. (author) / Wang, X.
2012-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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