Effect of extended phosphorus diffusion gettering on chromium impurity in HEM multicrystalline silicon: Fid-Bau Portal

Effect of extended phosphorus diffusion gettering on chromium impurity in HEM multicrystalline silicon

Khelifati, N. / Bouhafs, D. / Boumaour, M. / Abaidia, S. E. H. / Palahouane, B.

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Effect of extended phosphorus diffusion gettering on chromium impurity in HEM multicrystalline silicon

Khelifati, N. / Bouhafs, D. / Boumaour, M. / Abaidia, S. E. H. / Palahouane, B.

Effect of extended phosphorus diffusion gettering on chromium impurity in HEM multicrystalline silicon

Khelifati, N. / Bouhafs, D. / Boumaour, M. / Abaidia, S. E. H. / Palahouane, B.

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Document information

Title:

Effect of extended phosphorus diffusion gettering on chromium impurity in HEM multicrystalline silicon

Contributors:

Khelifati, N. (author) / Bouhafs, D. (author) / Boumaour, M. (author) / Abaidia, S. E. H. (author) / Palahouane, B. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 15 ; 56-60

Publication date:

2012-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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