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Rate Limiting Mechanism of Transition Metal Gettering in Multicrystalline Silicon

McHugo, S. A. / Thompson, A. C. / Imaizumi, M. / Hieslmair, H. / Weber, E. R.

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Rate Limiting Mechanism of Transition Metal Gettering in Multicrystalline Silicon

McHugo, S. A. / Thompson, A. C. / Imaizumi, M. / Hieslmair, H. / Weber, E. R.

Rate Limiting Mechanism of Transition Metal Gettering in Multicrystalline Silicon

McHugo, S. A. / Thompson, A. C. / Imaizumi, M. / Hieslmair, H. / Weber, E. R.

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Document information

Title:

Rate Limiting Mechanism of Transition Metal Gettering in Multicrystalline Silicon

Contributors:

McHugo, S. A. (author) / Thompson, A. C. (author) / Imaizumi, M. (author) / Hieslmair, H. (author) / Weber, E. R. (author) / Davies, G. / Nazare, M. H.

Published in:

Defects in Semiconductors: ICDS 19 ; 1795-1800

MATERIALS SCIENCE FORUM ; 258/263

Publication date:

1997-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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