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Length and Width Effects of Metal Films on Stress-Induced Bending of Surface Micromachined Cantilever Curved Grating
Length and Width Effects of Metal Films on Stress-Induced Bending of Surface Micromachined Cantilever Curved Grating
Length and Width Effects of Metal Films on Stress-Induced Bending of Surface Micromachined Cantilever Curved Grating
Kuo, J.-N. (author)
SURFACE REVIEW AND LETTERS ; 19 ; 1250001
2012-01-01
1250001 pages
Article (Journal)
English
DDC:
530.417
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