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Micromachined Si cantilever arrays for parallel AFM operation
Micromachined Si cantilever arrays for parallel AFM operation
Micromachined Si cantilever arrays for parallel AFM operation
Ahn, Y. (author) / Ono, T. (author) / Esashi, M. (author)
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY ; 22 ; 308-311
2008-01-01
4 pages
Article (Journal)
English
DDC:
621
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