AlN/3C-SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators: Fid-Bau Portal

AlN/3C-SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators

Lin, C. M. / Chen, Y. Y. / Felmetsger, V. V. / Senesky, D. G. / Pisano, A. P.

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AlN/3C-SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators

Lin, C. M. / Chen, Y. Y. / Felmetsger, V. V. / Senesky, D. G. / Pisano, A. P.

AlN/3C-SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators

Lin, C. M. / Chen, Y. Y. / Felmetsger, V. V. / Senesky, D. G. / Pisano, A. P.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

AlN/3C-SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators

Contributors:

Lin, C. M. (author) / Chen, Y. Y. (author) / Felmetsger, V. V. (author) / Senesky, D. G. (author) / Pisano, A. P. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 24 ; 2722-2727

Publication date:

2012-01-01

Size:

6 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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