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Characterization and Control of Residual Stress and Curvature in Anodically Bonded Devices and Substrates with Etched Features
Characterization and Control of Residual Stress and Curvature in Anodically Bonded Devices and Substrates with Etched Features
Characterization and Control of Residual Stress and Curvature in Anodically Bonded Devices and Substrates with Etched Features
Inzinga, R. A. (author) / Lin, T. W. (author) / Yadav, M. (author) / Johnson, H. T. (author) / Horn, G. P. (author)
EXPERIMENTAL MECHANICS ; 52 ; 637-648
2012-01-01
12 pages
Article (Journal)
English
DDC:
620.1
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