CVD Heteroepitaxial Growth of 3C-SiC on 4H-SiC (0001) Substrates: Fid-Bau Portal

CVD Heteroepitaxial Growth of 3C-SiC on 4H-SiC (0001) Substrates

Li, X. / Leone, S. / Andersson, S. / Kordina, O. / Henry, A. / Janzen, E.

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CVD Heteroepitaxial Growth of 3C-SiC on 4H-SiC (0001) Substrates

Li, X. / Leone, S. / Andersson, S. / Kordina, O. / Henry, A. / Janzen, E.

CVD Heteroepitaxial Growth of 3C-SiC on 4H-SiC (0001) Substrates

Li, X. / Leone, S. / Andersson, S. / Kordina, O. / Henry, A. / Janzen, E.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

CVD Heteroepitaxial Growth of 3C-SiC on 4H-SiC (0001) Substrates

Contributors:

Li, X. (author) / Leone, S. (author) / Andersson, S. (author) / Kordina, O. (author) / Henry, A. (author) / Janzen, E. (author)

Published in:

MATERIALS SCIENCE FORUM ; 717/720 ; 189-192

Publication date:

2012-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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