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    Influence of Threading Dislocations on Lifetime of Gate Thermal Oxide

    New search for: Yamamoto, K.
    New search for: Nagaya, M.
    New search for: Watanabe, H.
    New search for: Okuno, E.
    New search for: Yamamoto, T.
    New search for: Onda, S.

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    Influence of Threading Dislocations on Lifetime of Gate Thermal Oxide

    New search for: Yamamoto, K.
    New search for: Nagaya, M.
    New search for: Watanabe, H.
    New search for: Okuno, E.
    New search for: Yamamoto, T.
    New search for: Onda, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Influence of Threading Dislocations on Lifetime of Gate Thermal Oxide

    New search for: Yamamoto, K.
    New search for: Nagaya, M.
    New search for: Watanabe, H.
    New search for: Okuno, E.
    New search for: Yamamoto, T.
    New search for: Onda, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Influence of Threading Dislocations on Lifetime of Gate Thermal Oxide

    Contributors:

    Yamamoto, K. (author) / Nagaya, M. (author) / Watanabe, H. (author) / Okuno, E. (author) / Yamamoto, T. (author) / Onda, S. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 717/720 ; 477-480

    Publication date:

    2012-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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