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Influence of Threading Dislocations on Lifetime of Gate Thermal Oxide
Influence of Threading Dislocations on Lifetime of Gate Thermal Oxide
Influence of Threading Dislocations on Lifetime of Gate Thermal Oxide
Yamamoto, K. (author) / Nagaya, M. (author) / Watanabe, H. (author) / Okuno, E. (author) / Yamamoto, T. (author) / Onda, S. (author)
MATERIALS SCIENCE FORUM ; 717/720 ; 477-480
2012-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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